Language: English
ISBN/ISSN: 7030073517
Published on: 1999-01
Hardcover
Ion beam techniques have become a basic technology in the sciences and device manufacturing. For the efficient use of these techniques the appropriate choice, design and operation of ion source is important. This book deals with the fundamental knowledge regarding the gas discharge, extraction system, space-charge self-neutralization, and principles for producing various ions and determining the mass and energy spectra of the sources. It also covers the essential principles, present performance and recent results for various positive, negative, multi-charged and giant ion sources. The beam diagnostics are likewise described. A presentation of the necessary equations, diagrams, table and references makes this book useful as a handbook for ion sources. The book is intended for researchers, technicians and university students.
Fundamental knowledge regarding source performance, gas discharge, extraction system and space-charge neutralization is presented in chapters 1, 2, 3 and 9. positive ion sources are introduced in chapter 4. the principles for producing negative and multi-charged ions are discussed in chapters 6 and 8. the processes determining the mass and energy spectra of sources are discussed in chapter 7. the giant ion sources, multi-charged sources and negative sources, which have developed fastest during the past thirty years, are discussed in detail in chapter 5, 6 and 8. finally, beam diagnostic is introduced in chapter 10. many useful physical constants and data are given in the appendix. This book has extracted its contents from more than 4000 articles published in different journals and other publications, to avoid too much consumption of space only about one thousand foremost references, which are sufficient of guide the readers to further information on topics of particular interest, are given.
CONTENTS
1. Introduction
2. Gas Discharge Fundamentals
3. Extraction Systems for Ion Sources
4. Positive Ion Sources
5. Giant Ion Sources
6. Multiply Charged Ion Sources
7. Mass and Energy Spectra of Ion Sources
8. Negative Ion Sources
9. Self-Neutralization of Beam Space Charge
10. Beam Diagnostics for Ion Sources
APPENDIX
INDEX
