Author: Zheng Cui
Language: English
ISBN/ISSN: 7040176637
Published on: 2005-01
Hardcover
Language: English
ISBN/ISSN: 7040176637
Published on: 2005-01
Hardcover
【CONTENTS】
Preface
About The Author
Chapter 1 Introduction
Chapter 2 Optical Lithography
Chapter 3 Electron Beam Lithography
Chapter 4 Focused Ion Beam Technology
Chapter 5 X-Ray Lithography
Chapter 6 Etching Technology
Chapter 7 Replication Technology
Chapter 8 Applications of Micro-Nanofabrication Technology
Index
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